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[業界消息] TSMC to Offer Only One Version of 20nm Process Technology

TSMC to Offer Only One Version of 20nm Process Technology

http://www.xbitlabs.com/news/oth ... ess_Technology.html

20/22nm: gate-last, immersion lithography
14/16nm: double patterning, EUV, FinFET (?)

TSMC仲話要triple patterning? 死lor

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